Publication:

Low-loss, low-temperature PVD SiN waveguides

Date

2021

Proceedings Paper

https://doi.org/10.1109/gfp51802.2021.9673874

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Author(s)

Golshani, Negin

;

Witters, Thomas

;

;

;

De Coster, Jeroen

;

Milenin, Alexey

;

;

Mingardi, Andrea

;

Verheyen, Peter

;

Pantouvaki, Marianna

;

Van Campenhout, Joris

Journal

na

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Acq. date: 2026-09-15