Publication:

Evaluation of Litel's in-situ interferometer (ISI) technique for measuring projection-lens aberrations: an initial study

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Bisschop, Peter
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.accessioned2021-10-15T04:16:27Z
dc.date.available2021-10-15T04:16:27Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7389
dc.source.beginpage11
dc.source.conferenceOptical Microlithography XVI
dc.source.conferencedate23/02/2003
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage23
dc.title

Evaluation of Litel's in-situ interferometer (ISI) technique for measuring projection-lens aberrations: an initial study

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
7306.pdf
Size:
1.25 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions