Publication:

Epitaxial growth of diamond-hexagonal silicon on silicon

Date

2015
Proceedings Paper
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dc.contributor.authorQiu, Yang
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorKim, Min-Soo
dc.contributor.authorVos, Ingrid
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorVan Besien, Els
dc.contributor.authorMocuta, Dan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.accessioned2021-10-22T22:00:45Z
dc.date.available2021-10-22T22:00:45Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25786
dc.source.conferenceMicroscopy semiconductor materials MSM
dc.source.conferencedate29/03/2015
dc.source.conferencelocationCambridge UK
dc.title

Epitaxial growth of diamond-hexagonal silicon on silicon

dc.typeProceedings paper
dspace.entity.typePublication
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