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Accurate reliability evaluation of non-uniform ultrathin and high-k layers
Publication:
Accurate reliability evaluation of non-uniform ultrathin and high-k layers
Date
2003-03
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Roussel, Philippe
;
Degraeve, Robin
;
Kerber, Andreas
;
Pantisano, Luigi
;
Groeseneken, Guido
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Abstract
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1960
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations