Publication:

Transient pull-in simulation of electrostatic microvalve with physics-based contact function

Date

2021-04-26
Proceedings Paper
https://doi.org/10.1109/EuroSimE52062.2021.9410843
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dc.contributor.authorKeulemans, Grim
dc.contributor.authorLiang, Boshen
dc.contributor.authorPodkovskiy, Alexey
dc.contributor.authorJambaldinni, Shruti
dc.contributor.authorWysocka, Dominika
dc.contributor.authorZhang, Lei
dc.contributor.authorStakenborg, Tim
dc.contributor.authorCheyns, David
dc.contributor.authorHeremans, Paul
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorKeulemans, Grim
dc.contributor.imecauthorLiang, Boshen
dc.contributor.imecauthorPodkovskiy, Alexey
dc.contributor.imecauthorJambaldinni, Shruti
dc.contributor.imecauthorWysocka, Dominika
dc.contributor.imecauthorZhang, Lei
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecKeulemans, Grim::0000-0001-6896-7275
dc.contributor.orcidimecLiang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecPodkovskiy, Alexey::0000-0002-3050-5347
dc.contributor.orcidimecWysocka, Dominika::0000-0001-5056-6502
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecJambaldinni, Shruti::0000-0003-3925-2726
dc.contributor.orcidimecZhang, Lei::0000-0002-7405-6352
dc.date.accessioned2022-06-24T07:56:27Z
dc.date.available2021-11-02T15:55:10Z
dc.date.available2022-05-31T07:42:38Z
dc.date.available2022-06-24T07:56:27Z
dc.date.issued2021-04-26
dc.identifier.doi10.1109/EuroSimE52062.2021.9410843
dc.identifier.eisbn978-1-6654-1373-2
dc.identifier.issnNone
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37435
dc.publisherIEEE
dc.source.conference22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
dc.source.conferencedateAPR 19-22, 2021
dc.source.conferencelocationSt. Julian, Malta
dc.source.journal2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
dc.source.numberofpages5
dc.title

Transient pull-in simulation of electrostatic microvalve with physics-based contact function

dc.typeProceedings paper
dspace.entity.typePublication
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