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On the spatial resolution of scanning spreading resistance microscopy: experimental assessment and electro-mechanical modeling

Date

2005
Proceedings Paper
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dc.contributor.authorEyben, Pierre
dc.contributor.authorDegryse, Dominiek
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-16T01:33:07Z
dc.date.available2021-10-16T01:33:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10445
dc.source.beginpage264
dc.source.conferenceCharacterization and Metrology for ULSI Technology
dc.source.conferencedate15/03/2005
dc.source.conferencelocationRichardson, TX USA
dc.source.endpage269
dc.title

On the spatial resolution of scanning spreading resistance microscopy: experimental assessment and electro-mechanical modeling

dc.typeProceedings paper
dspace.entity.typePublication
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