Publication:

ESD issues in MEMS: a case study in micromirrors

Date

2008
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Author(s)

Sangameswaran, Sandeep
;
De Coster, Jeroen  
;
Linten, Dimitri  
;
Scholz, Mirko
;
Thijs, Steven  
;
Haspeslagh, Luc  
;
Witvrouw, Ann
;
Van Hoof, Chris  
;
Groeseneken, Guido  
;
De Wolf, Ingrid  

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1952 since deposited on 2021-10-17
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Acq. date: 2026-09-11

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