Publication:
Ge-on-insulator fabrication based on Ge-on-nothing technology
| dc.contributor.author | Yamamoto, Keisuke | |
| dc.contributor.author | Wang, Dong | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Porret, Clément | |
| dc.contributor.author | Cho, Jinyoun | |
| dc.contributor.author | Dessein, Kristof | |
| dc.contributor.author | Depauw, Valerie | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Depauw, Valerie | |
| dc.contributor.imecauthor | Porret, Clément | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Depauw, Valerie::0000-0003-2045-9698 | |
| dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
| dc.date.accessioned | 2025-06-17T13:12:30Z | |
| dc.date.available | 2024-04-09T17:57:46Z | |
| dc.date.available | 2025-06-17T13:12:30Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work was partially supported by a Grant-in-Aid for Scientific Research (No. 19H05616), JSPS-FWO Bilateral Joint Research Projects, and the Cooperative Research Project of the RIEC, Tohoku University. The development of the GeON template was carried out under a program of and funded by the European Space Agency (ESA) with contract no. 4000129924/20/NL/FE. The view expressed herein can in no way be taken to reflect the official opinion of the European Space Agency. The TEM analysis was conducted by Melco Semiconductor Engineering Corp. | |
| dc.identifier.doi | 10.35848/1347-4065/ad2d07 | |
| dc.identifier.issn | 0021-4922 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43807 | |
| dc.publisher | IOP Publishing Ltd | |
| dc.source.beginpage | Art. 04SP32 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 4 | |
| dc.source.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | |
| dc.source.numberofpages | 8 | |
| dc.source.volume | 63 | |
| dc.subject.keywords | ELECTRICAL-PROPERTIES | |
| dc.subject.keywords | GERMANIUM | |
| dc.subject.keywords | OPERATION | |
| dc.subject.keywords | MOSFETS | |
| dc.title | Ge-on-insulator fabrication based on Ge-on-nothing technology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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