Publication:
Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches
Date
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-16T03:28:18Z | |
| dc.date.available | 2021-10-16T03:28:18Z | |
| dc.date.issued | 2005-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10893 | |
| dc.source.beginpage | 183 | |
| dc.source.conference | Proceedings of the 16th MicroMechanics Europe Workshop - MME | |
| dc.source.conferencedate | 4/09/2005 | |
| dc.source.conferencelocation | Goteborg Sweden | |
| dc.source.endpage | 186 | |
| dc.title | Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |