Publication:

3 omega correction method for eliminating resistance measurement error due to Joule heating

Date

2021
Journal article
https://doi.org/10.1063/5.0063998
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dc.contributor.authorGuralnik, Benny
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik H.
dc.contributor.authorBeltran-Pitarch, Braulio
dc.contributor.authorosterberg, Frederik W.
dc.contributor.authorShiv, Lior
dc.contributor.authorMarangoni, Thomas A.
dc.contributor.authorStilling-Andersen, Andreas R.
dc.contributor.authorCagliani, Alberto
dc.contributor.authorHansen, Mikkel F.
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorOprins, Herman
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorDutta, Shibesh
dc.contributor.authorBorup, Kasper A.
dc.contributor.authorMihiretie, Besira M.
dc.contributor.authorPetersen, Dirch H.
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDutta, Shibesh
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2022-04-25T10:17:18Z
dc.date.available2021-12-10T02:04:24Z
dc.date.available2022-04-08T13:37:51Z
dc.date.available2022-04-25T10:17:18Z
dc.date.issued2021
dc.identifier.doi10.1063/5.0063998
dc.identifier.issn0034-6748
dc.identifier.pmidMEDLINE:34598479
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38598
dc.publisherAIP Publishing
dc.source.beginpage094711
dc.source.issue9
dc.source.journalREVIEW OF SCIENTIFIC INSTRUMENTS
dc.source.numberofpages6
dc.source.volume92
dc.subject.keywordsMICRO 4-POINT PROBE
dc.subject.keywordsTHERMAL-CONDUCTIVITY
dc.subject.keywordsRESISTIVITY MEASUREMENTS
dc.subject.keywordsTEMPERATURE-COEFFICIENT
dc.subject.keywordsSILICON
dc.subject.keywordsFILMS
dc.title

3 omega correction method for eliminating resistance measurement error due to Joule heating

dc.typeJournal article
dspace.entity.typePublication
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