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EELS analyses of metal-inserted high-k dielectric stacks
Publication:
EELS analyses of metal-inserted high-k dielectric stacks
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Date
2008
Proceedings Paper
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17329.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
McGilvery, C.M.
;
McFadzean, S.
;
De Gendt, Stefan
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1941
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1941
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations