Publication:

Comparison of LFLE and LELE manufacturability

Date

2008
Proceedings Paper
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dc.contributor.authorMiller, Andy
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorVangoidsenhoven, Diziana
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorShioya, Takeo
dc.contributor.authorHoshiko, Kenji
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorVangoidsenhoven, Diziana
dc.contributor.imecauthorMurdoch, Gayle
dc.date.accessioned2021-10-17T09:03:17Z
dc.date.available2021-10-17T09:03:17Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14169
dc.source.conference5th International Symposium on Immersion Lithography Extensions
dc.source.conferencedate22/09/2008
dc.source.conferencelocationDen Haag Nederland
dc.title

Comparison of LFLE and LELE manufacturability

dc.typeProceedings paper
dspace.entity.typePublication
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