Publication:
Piezoresistivity and electrical properties of poly-SiGe deposited at CMOS-compatible temperatures
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-18T16:38:02Z | |
| dc.date.available | 2021-10-18T16:38:02Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17167 | |
| dc.source.beginpage | 476 | |
| dc.source.conference | 40th European Solid-State Device Research Conference - ESSDERC | |
| dc.source.conferencedate | 13/09/2010 | |
| dc.source.conferencelocation | Sevilla Spain | |
| dc.source.endpage | 479 | |
| dc.title | Piezoresistivity and electrical properties of poly-SiGe deposited at CMOS-compatible temperatures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |