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Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability
Publication:
Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability
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Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Li, Yunlong
;
Tokei, Zsolt
;
Roussel, Philippe
;
Groeseneken, Guido
;
Maex, Karen
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1927
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Acq. date: 2025-12-15
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Metrics
Views
1927
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-15
Citations