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The evaluation and the inegration of low-k organic spin-on materials in a non-etchback interconnect process
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1994 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-11
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Metrics
Views
1994 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-11
Citations