Publication:
Backscattering/channeling study of high dose rare-earth implants in Si
Date
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Wu, Ming Fang | |
| dc.contributor.author | Wahl, U. | |
| dc.contributor.author | Pattyn, Hugo | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Langouche, G. | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Pattyn, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-09-30T09:59:15Z | |
| dc.date.available | 2021-09-30T09:59:15Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2274 | |
| dc.source.conference | International Conference on Ion Beam Analysis - IBA; July 1997; Lisboa, Portugal. | |
| dc.source.conferencelocation | ||
| dc.title | Backscattering/channeling study of high dose rare-earth implants in Si | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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