Publication:
Specification of trace metal contamination for image sensors
Date
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Lavizzari, Simone | |
dc.contributor.author | Guerrieri, Stefano | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.date.accessioned | 2021-10-23T12:49:22Z | |
dc.date.available | 2021-10-23T12:49:22Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27007 | |
dc.identifier.url | http://www.scientific.net/SSP.255.309 | |
dc.source.beginpage | 309 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS | |
dc.source.conferencedate | 12/09/2016 | |
dc.source.conferencelocation | Knokke-Heist Belgium | |
dc.source.endpage | 312 | |
dc.title | Specification of trace metal contamination for image sensors | |
dc.type | Proceedings paper | |
dspace.entity.type | Publication | |
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