Publication:
Siliziumbasierter Elektrostatischer Vibrationswandler
Date
| dc.contributor.author | Parton, Els | |
| dc.contributor.imecauthor | Parton, Els | |
| dc.date.accessioned | 2021-10-15T15:19:12Z | |
| dc.date.available | 2021-10-15T15:19:12Z | |
| dc.date.issued | 2004-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9397 | |
| dc.source.beginpage | 24 | |
| dc.source.endpage | 25 | |
| dc.source.journal | Markt & Technik | |
| dc.title | Siliziumbasierter Elektrostatischer Vibrationswandler | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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