Publication:
An (un)solvable problem in SIMS: B-interfacial profiling
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Peytier, Ivan | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Fruehauf, Jens | |
| dc.contributor.author | Bergmaier, A. | |
| dc.contributor.author | Dollinger, G. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-15T07:29:20Z | |
| dc.date.available | 2021-10-15T07:29:20Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8331 | |
| dc.source.beginpage | 371 | |
| dc.source.endpage | 376 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 203-204 | |
| dc.title | An (un)solvable problem in SIMS: B-interfacial profiling | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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