Publication:

Where to apply sustainability optimizations in process flows?

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3012753
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dc.contributor.authorFilippidou, Konstantina
dc.contributor.authorBezard, Philippe
dc.contributor.authorLiu, I-Yun
dc.contributor.authorRolin, Cedric
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.imecauthorFilippidou, Konstantina
dc.contributor.imecauthorBezard, Philippe
dc.contributor.imecauthorLiu, I-Yun
dc.contributor.imecauthorRolin, Cedric
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.orcidimecFilippidou, Konstantina::0009-0005-6098-4085
dc.contributor.orcidimecBezard, Philippe::0000-0003-2499-0240
dc.contributor.orcidimecLiu, I-Yun::0009-0009-4281-9245
dc.contributor.orcidimecRolin, Cedric::0000-0001-5542-8504
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.date.accessioned2024-08-20T07:57:49Z
dc.date.available2024-06-06T18:30:25Z
dc.date.available2024-08-20T07:57:49Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.identifier.doi10.1117/12.3012753
dc.identifier.eisbn978-1-5106-7223-9
dc.identifier.isbn978-1-5106-7222-2
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43991
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage129580L
dc.source.conferenceConference on Advanced Etch Technology and Process Integration for Nanopatterning XIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages10
dc.source.volume12958
dc.title

Where to apply sustainability optimizations in process flows?

dc.typeProceedings paper
dspace.entity.typePublication
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