Publication:

Influence of CVD diamond growth plasma on AIN thin films

Date

2014
Presentation
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dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorDegutis, Giedrius
dc.contributor.authorDexters, Wim
dc.contributor.authorRuttens, Bart
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-22T04:46:54Z
dc.date.available2021-10-22T04:46:54Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24390
dc.source.conferenceHasselt Diamond Workshop - SBDD XIX
dc.source.conferencedate19/02/2014
dc.source.conferencelocationHasselt Belgium
dc.title

Influence of CVD diamond growth plasma on AIN thin films

dc.typeOral presentation
dspace.entity.typePublication
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