Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth

dc.contributor.author	Karim, Marwa
dc.contributor.author	Martini, Roberto
dc.contributor.author	Sivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.author	Depauw, Valerie
dc.contributor.author	Van Nieuwenhuysen, Kris
dc.contributor.author	Ramadan, Wegdan
dc.contributor.author	Gordon, Ivan
dc.contributor.author	Poortmans, Jef
dc.contributor.imecauthor	Sivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.imecauthor	Depauw, Valerie
dc.contributor.imecauthor	Gordon, Ivan
dc.contributor.imecauthor	Poortmans, Jef
dc.contributor.orcidimec	Sivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.contributor.orcidimec	Depauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimec	Gordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimec	Poortmans, Jef::0000-0003-2077-2545
dc.date.accessioned	2021-10-22T02:29:21Z
dc.date.available	2021-10-22T02:29:21Z
dc.date.issued	2014
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24034
dc.identifier.url	http://the-psst.com/psst2014/ISO%20B5%20libro%20PSST%202014-%20corrected%2020%20feb%202014.pdf
dc.source.beginpage	56
dc.source.conference	Porous Semiconductors Science and Technology - PSST
dc.source.conferencedate	9/03/2014
dc.source.conferencelocation	Alicante Spain
dc.source.endpage	57
dc.title	Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth
dc.type	Proceedings paper
dspace.entity.type	Publication
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