Systematic study of interfacial reactions induced by metal electrodes in high-k/InGaAs gate stacks

Yoshida, Shinichi; Lin, Dennis; Vais, Abhitosh; Alian, AliReza; Franco, Jacopo; El Kazzi, Salim; Mols, Yves; Miyanami, Yuki; Nakazawa, Masashi; Collaert, Nadine; Watanabe, H; Thean, Aaron

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Systematic study of interfacial reactions induced by metal electrodes in high-k/InGaAs gate stacks

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2016

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Applied Physics Letters

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Systematic study of interfacial reactions induced by metal electrodes in high-k/InGaAs gate stacks

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