Publication:

B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

Date

2022
Journal article
https://doi.org/10.1149/2162-8777/ac546e
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dc.contributor.authorRengo, Gianluca
dc.contributor.authorPorret, Clément
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRosseel, Erik
dc.contributor.authorAyyad, Mustafa
dc.contributor.authorMorris, Richard
dc.contributor.authorKhazaka, Rami
dc.contributor.authorLoo, Roger
dc.contributor.authorVantomme, Andre
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorAyyad, Mustafa
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidextKhazaka, Rami::0000-0002-5229-9708
dc.contributor.orcidextVantomme, Andre::0000-0001-9158-6534
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMorris, Richard J. H.::0000-0002-0902-7088
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.date.accessioned2023-05-04T10:14:12Z
dc.date.available2023-05-04T10:14:12Z
dc.date.embargo2022-02-25
dc.date.issued2022
dc.description.wosFundingTextG. Rengo acknowledges the Research Foundation of Flanders (FWO) for granting him a PhD fellowship strategic basic research. The imec core CMOS program members, European Commission, local authorities and the imec pilot line are acknowledged for their support. This project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel.
dc.identifier.doi10.1149/2162-8777/ac546e
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41545
dc.publisherELECTROCHEMICAL SOC INC
dc.source.beginpageArt. 024008
dc.source.endpagena
dc.source.issue2
dc.source.journalECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
dc.source.numberofpages10
dc.source.volume11
dc.subject.keywordsBORON
dc.subject.keywordsCMOS
dc.title

B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts

dc.typeJournal article
dspace.entity.typePublication
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