Publication:
IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trend
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2679 since deposited on 2021-10-25
15last month
4last week
Acq. date: 2026-09-13
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Statistics
Views
2679 since deposited on 2021-10-25
15last month
4last week
Acq. date: 2026-09-13
Citations