Publication:
IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trend
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2656 since deposited on 2021-10-25
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Acq. date: 2026-07-15
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Statistics
Views
2656 since deposited on 2021-10-25
1last month
1last week
Acq. date: 2026-07-15
Citations