Publication:
IMEC N7, N5 and beyond: DTCO, STCO and EUV insertion strategy to maintain affordable scaling trend
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2616 since deposited on 2021-10-25
10last month
3last week
Acq. date: 2025-12-15
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Metrics
Views
2616 since deposited on 2021-10-25
10last month
3last week
Acq. date: 2025-12-15
Citations