Publication:
Comparative study of porous SOG films with different non-destructive instrumentation
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Kondoh, Eiichi | |
| dc.contributor.author | Linskens, Frank | |
| dc.contributor.author | Gidley, D. W. | |
| dc.contributor.author | Lee, Hean-Cheal | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.contributor.author | Sune, Jorge | |
| dc.date.accessioned | 2021-10-14T16:36:36Z | |
| dc.date.available | 2021-10-14T16:36:36Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5034 | |
| dc.source.beginpage | 189 | |
| dc.source.conference | Proceedings of the IEEE 2001 International Interconnect Technology Conference | |
| dc.source.conferencedate | 4/06/2001 | |
| dc.source.conferencelocation | Burlingame, CA USA | |
| dc.source.endpage | 191 | |
| dc.title | Comparative study of porous SOG films with different non-destructive instrumentation | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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