Publication:

Image contrast metrology for EUV lithography

Date

2022-09-29

Proceedings Paper

https://doi.org/10.1117/12.2640647

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Author(s)

Brunner, Timothy A.

;

Truffert, Vincent

;

Ausschnitt, Kit

;

Kissoon, Nicola N.

;

Duriau, Edouard

;

;

van Look, Lieve

;

Franke, Joern-Holger

Journal

Proceedings of SPIE

Metrics

1271 since deposited on 2023-03-22

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Acq. date: 2026-01-09