Publication:
Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples
Date
| dc.contributor.author | Stephenson, Robert | |
| dc.contributor.author | Verhulst, Anne | |
| dc.contributor.author | De Wolf, Peter | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Verhulst, Anne | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Verhulst, Anne::0000-0002-3742-9017 | |
| dc.date.accessioned | 2021-10-14T11:41:11Z | |
| dc.date.available | 2021-10-14T11:41:11Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3855 | |
| dc.source.beginpage | 193 | |
| dc.source.conference | 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 201 | |
| dc.title | Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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