Publication:

Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor

Date

2007

Presentation

Simple item page Full metadata Statistics

Author(s)

;

Delabie, Annelies

;

Van Elshocht, Sven

;

De Jaeger, Brice

;

Nicholas, Gareth

;

;

;

Zimmerman, Paul

;

;

Pourtois, Geoffrey

;

;

;

Winderickx, Gillis

;

Huyghebaert, Cedric

;

Terzieva, Valentina

;

;

;

;

Statistics

2019 since deposited on 2021-10-16

1last month

Acq. date: 2026-01-26