Publication:
Cu/lowK interconnects: challenges of plasma processing
Date
| dc.contributor.author | Braginsky, O | |
| dc.contributor.author | Rakhimov, A | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-20T10:08:20Z | |
| dc.date.available | 2021-10-20T10:08:20Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20386 | |
| dc.source.conference | Semicon Russia: EU-RU.NET Workshop | |
| dc.source.conferencedate | 15/05/2012 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | Cu/lowK interconnects: challenges of plasma processing | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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