Publication:
Impact of Processing Factors on the Low-Frequency Noise of Gate-All-Around Silicon Vertical Nanowire FETs
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Matagne, Philippe | |
| dc.contributor.author | Veloso, Anabela | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Matagne, Philippe | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-31T11:13:31Z | |
| dc.date.available | 2021-10-31T11:13:31Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37180 | |
| dc.identifier.url | https://doi.org/10.1149/10404.0003ecst | |
| dc.source.beginpage | 3 | |
| dc.source.conference | Semiconductor Process Integration 12 | |
| dc.source.conferencedate | 10/10/2021 | |
| dc.source.conferencelocation | online online | |
| dc.source.endpage | 16 | |
| dc.title | Impact of Processing Factors on the Low-Frequency Noise of Gate-All-Around Silicon Vertical Nanowire FETs | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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