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Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

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337 since deposited on 2023-05-04
Acq. date: 2026-06-26

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1342 since deposited on 2023-05-04
Acq. date: 2026-06-26

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337 since deposited on 2023-05-04
Acq. date: 2026-06-26

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1342 since deposited on 2023-05-04
Acq. date: 2026-06-26

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