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Heterogeneous integration of Si photodiodes on silicon nitride for near-visible light detection

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Acq. date: 2026-02-28

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240 since deposited on 2023-05-04
21last month
4last week
Acq. date: 2026-02-28

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1334 since deposited on 2023-05-04
Acq. date: 2026-02-28

Citations