Publication:

First demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices

Date

2019
Meeting abstract
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Author(s)

Ramesh, Siva  
;
Vadakupudhu Palayam, Senthil  
;
Rosseel, Erik  
;
Arreghini, Antonio  
;
Kunert, Bernardette  
;
Baryshnikova, Marina  
;
Zhang, Liping  
;
Ong, Patrick  
;
Teugels, Lieve  
;
Pak, Murat  
;
Jossart, Nico  
;
Raymaekers, Tom
;
Stiers, Jimmy  
;
Van den Bosch, Geert  
;
Furnemont, Arnaud  

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