Publication:
Status and challenges of directed self-assembly
Date
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Rincon Delgadillo, Paulina | |
| dc.contributor.author | Singh, Arjun | |
| dc.contributor.author | Nealey, Paul | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
| dc.contributor.imecauthor | Singh, Arjun | |
| dc.date.accessioned | 2021-10-21T08:01:10Z | |
| dc.date.available | 2021-10-21T08:01:10Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22433 | |
| dc.source.conference | Semicon Europa | |
| dc.source.conferencedate | 10/10/2013 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Status and challenges of directed self-assembly | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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