Publication:

Engineering of acoustic meta-materials with application to MEMS BAW resonators

Date

2011-06
Proceedings Paper
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dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorVerbist, Agnes
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-19T18:19:08Z
dc.date.available2021-10-19T18:19:08Z
dc.date.embargo9999-12-31
dc.date.issued2011-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19712
dc.source.beginpage930
dc.source.conference16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
dc.source.endpage933
dc.title

Engineering of acoustic meta-materials with application to MEMS BAW resonators

dc.typeProceedings paper
dspace.entity.typePublication
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