Publication:
Characterization of porous low-k dielectric films by using positron annihilation
Date
| dc.contributor.author | Uedono, Akira | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Krause-Rehberg, R | |
| dc.contributor.author | Wagner, A | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-26T06:08:48Z | |
| dc.date.available | 2021-10-26T06:08:48Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31989 | |
| dc.source.conference | JAPAN-RUB Workshop on Plasma Science | |
| dc.source.conferencedate | 4/07/2018 | |
| dc.source.conferencelocation | Ruhr-Universität Bochum Germany | |
| dc.title | Characterization of porous low-k dielectric films by using positron annihilation | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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