Publication:

Experimental validation of mechanical stress models by micro-Raman spectroscopy

Date

1996
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPozzat, G.
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorHoward, Dave
dc.contributor.authorIgnat, M.
dc.contributor.authorJain, Suresh
dc.contributor.authorMaes, Herman
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.accessioned2021-09-29T14:24:02Z
dc.date.available2021-09-29T14:24:02Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1176
dc.source.beginpage1751
dc.source.endpage1754
dc.source.journalMicroelectronics and Reliability
dc.source.volume36
dc.title

Experimental validation of mechanical stress models by micro-Raman spectroscopy

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
1152.pdf
Size:
214.78 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles