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Direct physical evidence of mechanisms of leakage and equivalent oxide thickness reduction in metal-insulator-metal capacitors based on RuOx/TiOx/SrxTiyOz/TiN stacks
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1968 since deposited on 2021-10-20
Acq. date: 2025-10-23
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Views
1968 since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations