Publication:
Transient phenomena of silicon under oxygen bombardment
Date
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-30T11:48:44Z | |
| dc.date.available | 2021-09-30T11:48:44Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2531 | |
| dc.source.conference | SIMS Europe Workshop; 4-6 October 1998; Münster, Germany. | |
| dc.source.conferencelocation | ||
| dc.title | Transient phenomena of silicon under oxygen bombardment | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |