Publication:

CMOS-compatible tungsten heaters for silicon photonic waveguides

Date

2012
Proceedings Paper
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dc.contributor.authorMasood, Adil
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorGoossens, Danny
dc.contributor.authorLepage, Guy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBogaerts, Wim
dc.contributor.imecauthorMasood, Adil
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorLepage, Guy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2021-10-20T13:20:38Z
dc.date.available2021-10-20T13:20:38Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21118
dc.source.beginpage234
dc.source.conference9th International Conference on Group IV Photonics
dc.source.conferencedate29/08/2012
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage236
dc.title

CMOS-compatible tungsten heaters for silicon photonic waveguides

dc.typeProceedings paper
dspace.entity.typePublication
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