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Process optimization and variability improvement of contacts using grapho-epitaxy DSA

Date

2017
Proceedings Paper
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dc.contributor.authorBoeckx, Carolien
dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-24T03:01:56Z
dc.date.available2021-10-24T03:01:56Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27870
dc.source.conference3rd DSA Symposium
dc.source.conferencedate17/09/2017
dc.source.conferencelocationChicago, IL USA
dc.title

Process optimization and variability improvement of contacts using grapho-epitaxy DSA

dc.typeProceedings paper
dspace.entity.typePublication
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