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EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing

Date

2016
Meeting abstract
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dc.contributor.authorMurota, Junichi
dc.contributor.authorLoo, Roger
dc.contributor.authorTillack, Bernd
dc.contributor.authorLe Thanh, Vin
dc.contributor.authorChiussi, Stefano
dc.contributor.authorHirayama, Makoto
dc.contributor.authorNiwano, Michio
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-23T13:08:06Z
dc.date.available2021-10-23T13:08:06Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27057
dc.source.beginpage58
dc.source.conferenceJSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"
dc.source.conferencedate24/11/2016
dc.source.conferencelocationJülich Germany
dc.source.endpage59
dc.title

EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing

dc.typeMeeting abstract
dspace.entity.typePublication
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