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Effect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitors
Publication:
Effect of top electrode deposition conditions on the reliability of Tt/PZT/Pt ferroelectric capacitors
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wouters, Dirk
;
Bartic, Andrei
;
Norga, Gerd
;
Maes, Herman
Journal
Abstract
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2014
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-12
Citations
Metrics
Views
2014
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-12
Citations