Publication:

Silicon surface texturing in a chlorine plasma

Date

2000
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDekkers, Harold
dc.contributor.authorDuerinckx, Filip
dc.contributor.authorSzlufcik, Jozef
dc.contributor.authorNijs, Johan
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorDuerinckx, Filip
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecDuerinckx, Filip::0000-0003-2570-7371
dc.date.accessioned2021-10-14T12:52:04Z
dc.date.available2021-10-14T12:52:04Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4306
dc.source.beginpage1532
dc.source.conference16th European Photovoltaic Solar Energy Conference. Proceedings; May 2000; Glasgow, Scotland.
dc.source.conferencedate1/05/2000
dc.source.conferencelocationGlasgow UK
dc.source.endpage1535
dc.title

Silicon surface texturing in a chlorine plasma

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
4290.pdf
Size:
560.38 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions