Publication:

Challenges for scaled damascene interconnects

Date

2013
Meeting abstract
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dc.contributor.authorArmini, Silvia
dc.contributor.authorSwerts, Johan
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorVereecken, Philippe
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-21T06:42:52Z
dc.date.available2021-10-21T06:42:52Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21983
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2013-02/32/2057.abstract
dc.source.beginpage2057
dc.source.conferenceECS Fall Meeting
dc.source.conferencedate26/10/2013
dc.source.conferencelocationSan francisco, CA USA
dc.title

Challenges for scaled damascene interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
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