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Piezoelectric scavengers in MEMS technology: fabrication and simulation

Date

2005-11
Proceedings Paper
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dc.contributor.authorSchmitz, Andreas
dc.contributor.authorSterken, Tom
dc.contributor.authorRenaud, Michael
dc.contributor.authorFiorini, Paolo
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.date.accessioned2021-10-16T04:53:36Z
dc.date.available2021-10-16T04:53:36Z
dc.date.issued2005-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11174
dc.source.beginpage61
dc.source.conferenceTechnical Digest PowerMEMS. 5th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Application
dc.source.conferencedate28/11/2005
dc.source.conferencelocationTokyo Japan
dc.source.endpage64
dc.title

Piezoelectric scavengers in MEMS technology: fabrication and simulation

dc.typeProceedings paper
dspace.entity.typePublication
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