Publication:

Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation

Date

1996
Proceedings Paper
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dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDeferm, Ludo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDeferm, Ludo
dc.date.accessioned2021-09-29T14:16:10Z
dc.date.available2021-09-29T14:16:10Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1063
dc.source.beginpage46
dc.source.conferenceExtended Abstracts of the 1996 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate26/08/1996
dc.source.conferencelocationYokohama Japan
dc.source.endpage48
dc.title

Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation

dc.typeProceedings paper
dspace.entity.typePublication
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