Publication:
Integrating CMOS and MEMS is the future
Date
| dc.contributor.author | Parton, Els | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Parton, Els | |
| dc.date.accessioned | 2021-10-17T09:39:55Z | |
| dc.date.available | 2021-10-17T09:39:55Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2008-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14282 | |
| dc.source.beginpage | 28 | |
| dc.source.endpage | 29 | |
| dc.source.journal | Semiconductor Manufacturing China | |
| dc.title | Integrating CMOS and MEMS is the future | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |