Publication:
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Date
| dc.contributor.author | Werner, M. | |
| dc.contributor.author | van den Berg, J.A. | |
| dc.contributor.author | Armour, D.G. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Collart, E.H.J. | |
| dc.contributor.author | Goldberg, R.D. | |
| dc.contributor.author | Bailey, P. | |
| dc.contributor.author | Noakes, T.C.Q. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T17:52:35Z | |
| dc.date.available | 2021-10-15T17:52:35Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9910 | |
| dc.source.beginpage | 67 | |
| dc.source.endpage | 74 | |
| dc.source.journal | Nuclear Instruments & Methods in Physics Research B | |
| dc.source.volume | 216 | |
| dc.title | Damage accumulation and dopant migration during shallow As and Sb implantation into Si | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |