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Influence of template fill in grapho-epitaxy DSA
Publication:
Influence of template fill in grapho-epitaxy DSA
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Doise, Jan
;
Bekaert, Joost
;
Chan, BT
;
Hong, Sung Eun
;
Lin, Guanyang
;
Gronheid, Roel
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Acq. date: 2025-12-10
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1865
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-10
Citations